文章基本信息

标题：Studies on Thin Films of Antimony Vacuum Evaporated from a Knudsen-Type Source
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作者：K.L. Chaudhary ; Ramesh Kumar ; A.K. Chopra 等
期刊名称：Defence Science Journal
印刷版ISSN：0976-464X
出版年度：2013
卷号：50
期号：4
页码：411-418
DOI：10.14429/dsj.50.3752
语种：English
出版社：Defence Scientific Information & Documentation Centre
摘要：A Knudsen-type evaporation source was used for the deposition of thin films of antimony to study their growth and microstructure under different rates of evaporation and substrate temperatures when vacuum evaporated onto air-cleaved KC1, mica, amorphous carbon and doped KCl substrates. The crystallisation of these films on exposure to an electron beam of moderate intensity inside the electron microscope was studied, and the orientations of the crystallised films wrt the substrate were established. It has been concluded that antimony films prepared by this source compare well with those prepared by other sources of vacuum evaporation.
关键词：Evaporation and substrate temperatures;Deposition;Thin films;Electron beam;Microstructure;Substrates;Crystallisation;Vacuum evaporation;Air cleaved;Amorphous carbon;Knudsen type evaporation