文章基本信息

标题：Fabricating Zr-Based Bulk Metallic Glass Microcomponent by Suction Casting Using Silicon Micromold
本地全文：下载
作者：Zhijing Zhu ; Chuanyun Yi ; Tielin Shi 等
期刊名称：Advances in Mechanical Engineering
印刷版ISSN：1687-8140
电子版ISSN：1687-8140
出版年度：2014
卷号：2014
DOI：10.1155/2014/362484
出版社：Sage Publications Ltd.
摘要：A suction casting process for fabricating Zr55Cu30Al10Ni5 bulk metallic glass microcomponent using silicon micromold has been studied. A complicated BMG microgear with 50 μm in module has been cast successfully. Observed by scanning electron microscopy and laser scanning confocal microscopy, we find that the cast microgear duplicates the silicon micromold including the microstructure on the surface. The amorphous state of the microgear is confirmed by transmission election microscopy. The nanoindentation hardness and elasticity modulus of the microgear reach 6.5 GPa and 94.5 GPa. The simulation and experimental results prove that the suction casting process with the silicon micromold is a promising one-step method to fabricate bulk metallic glass microcomponents with high performance for applications in microelectromechanical system.