文章基本信息

标题：Full Aperture CO<sub>2</sub> Laser Process to Improve Laser Damage Resistance of Fused Silica Optical Surface
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作者：Wei Liao ; Chuanchao Zhang ; Xiaofen Sun 等
期刊名称：Advances in Condensed Matter Physics
印刷版ISSN：1687-8108
电子版ISSN：1687-8124
出版年度：2014
卷号：2014
DOI：10.1155/2014/676108
出版社：Hindawi Publishing Corporation
摘要：An improved method is presented to scan the full-aperture optical surface rapidly by using galvanometer steering mirrors. In contrast to the previous studies, the scanning velocity is faster by several orders of magnitude. The velocity is chosen to allow little thermodeposition thus providing small and uniform residual stress. An appropriate power density is set to obtain a lower processing temperature. The proper parameters can help to prevent optical surface from fracturing during operation at high laser flux. S-on-1 damage test results show that the damage threshold of scanned area is approximately 40% higher than that of untreated area.