文章基本信息

标题：Fabrication of Nanocrystalline TiO₂ Thin Film Ammonia Vapor Sensor
本地全文：下载
作者：Shailesh Pawar ; Manik Chougule ; Sanjay Patil 等
期刊名称：Journal of Sensor Technology
印刷版ISSN：2161-122X
电子版ISSN：2161-1238
出版年度：2011
卷号：1
期号：1
页码：9-16
DOI：10.4236/jst.2011.11002
出版社：Scientific Research Publishing
摘要：Nanocrystalline titanium oxide thin films have been deposited by spin coating technique and then have been analyzed to test their application in NH₃ gas-sensing technology. In particular, spectrophotometric and con-ductivity measurements have been performed in order to determine the optical and electrical properties of titanium oxide thin films. The structure and the morphology of such material have been investigated by X ray diffraction, Scanning microscopy, high resolution electron microscopy and selected area electron diffrac-tion. The X-ray diffraction measurements confirmed that the films grown by this technique have good crys-talline tetragonal mixed anatase and rutile phase structure The HRTEM image of TiO₂ thin film showed grains of about 50-60 nm in size with aggregation of 10-15 nm crystallites. Selected area electron diffraction pattern shows that the TiO₂ films exhibited tetragonal structure. The surface morphology (SEM) of the TiO₂ film showed that the nanoparticles are fine The optical band gap of TiO₂ film is 3.26 eV. Gas sensing proper-ties showed that TiO₂ films were sensitive as well as fast in responding to NH3. A high sensitivity for ammo-nia indicates that the TiO₂ films are selective for this gas.
关键词：Sol Gel Method; Structural Properties; Optical Properties; NH₃ Sensor