文章基本信息

标题：Flexible Surface Acoustic Wave Device with AlN Film on Polymer Substrate
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作者：Jian Zhou ; Shurong Dong ; Hao Jin 等
期刊名称：Journal of Control Science and Engineering
印刷版ISSN：1687-5249
电子版ISSN：1687-5257
出版年度：2012
卷号：2012
DOI：10.1155/2012/610160
出版社：Hindawi Publishing Corporation
摘要：Surface acoustic wave device with c-axis-oriented aluminum nitride (AlN) piezoelectric thin films on polymer substrates can be potentially used for development of flexible sensors, flexible microfluidic applications, microsystems, and lab-on-chip systems. In this work, the AlN films have been successfully deposited on polymer substrates using the DC reactive magnetron-sputtering method at room temperature, and the XRD, SEM, and AFM methods reveal that low deposition pressure is beneficial to the highly c-axis-oriented AlN film on polymer substrates. Studies toward the development of AlN thin film-based flexible surface acoustic wave devices on the polymer substrates are initiated and the experimental and simulated results demonstrate the devices showing the acoustic wave velocity of 9000–10000 m/s, which indicate the AlN lamb wave.