文章基本信息

标题：Microstructuring of Su-8 Resist for MEMS and Bio-Applications
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作者：P.K. Dey ; B. Pramanick ; A. RaviShankar 等
期刊名称：International Journal on Smart Sensing and Intelligent Systems
印刷版ISSN：1178-5608
出版年度：2010
卷号：3
期号：01
页码：118-129
出版社：Massey University
摘要：Some studies on the fabrication of micro-needles, micro-pillers, and micro-channels using SU-8 negative photoresist for MEMS and bio-applications are reported. The SU-8 processing technology was standardized for the purpose. Micro-pillars were fabricated on SU-8 polymer by soft lithographic technique. Micro-needles were realized on SU-8 film utilizing lensing effect of the etched groove structure of the glass substrate. Micro-channel was fabricated by molding of PDMS polymer on patterned SU-8 ridge structure. Structural characterization of the fabricated structures were investigated using optical microscope and SEM.