文章基本信息

标题：Development and Characterization of Surface Micro-Machined Mems Based Varactor
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作者：Subha Chakraborty ; A. Bhattacharya ; Ashesh Ray Chaudhuri 等
期刊名称：International Journal on Smart Sensing and Intelligent Systems
印刷版ISSN：1178-5608
出版年度：2010
卷号：3
期号：01
页码：94-107
出版社：Massey University
摘要：This paper presents complete behavioral analysis of a surface micro-machined MEMS varactor for frequency tuning application in voltage controlled oscillators in RF applications with high Quality factor and tunability. The dimensions of the MEMS device have been optimized with Finite Element Method based CoventorWare analysis and verified through lumped parameter analysis in Saber platform. The MEMS varactor has been fabricated with the PolyMUMPs process. The paper also describes the Mechanical and electrical characterization of the MEMS varactor to meet the designed specification.
关键词：MEMS; varactor; VCO; capacitance tuning ratio; pull-in; SEM; vibration ;spectrum; LDV.