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  • 标题:Hitachi's Spherical Aberration Corrected STEM: HD-2700
  • 本地全文:下载
  • 作者:Kuniyasu Nakamura ; Hiromi Inada ; Hiroyuki Tanaka
  • 期刊名称:Hitachi Review
  • 印刷版ISSN:0018-277X
  • 出版年度:2007
  • 卷号:56
  • 期号:03
  • 出版社:Hitachi Ltd
  • 摘要:

    It has been a long-held dream of electron microscopy engineers to correct or eliminate the spherical aberration that theoretically occurs in the electron optics, a development that would dramatically improve the resolution of electron microscopes. Now Hitachi High-Technologies Corporation has developed the HD-2700, a next-generation STEM that is equipped with a spherical aberration corrector. Essentially, the corrector acts as a kind of concave lens that reduces the spherical aberration of the electron optics to the absolute minimum. As a result, a much smaller probe diameter is obtained while keeping the larger convergence angle, and this provides significantly improved resolution and analytical sensitivity. It is anticipated that the HD-2700 STEM will prove to be a powerful analytical tool in researching and developing next-generation semiconductors, materials, and nanotechnologies.

  • 关键词:STEM; HAADF-STEM; BF-STEM; Aberration Correction; EDX
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