文章基本信息

标题：Influence of Critical Flow in the Differentially Pumped Chamber AQUASEM
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作者：P. Hlavatá ; J. MaxaJ. Maxa ; M. Bílek 等
期刊名称：Advances in Military Technology
印刷版ISSN：1802-2308
电子版ISSN：2533-4123
出版年度：2017
卷号：12
期号：2
DOI：10.3849/aimt.01201
语种：English
出版社：University of Defence
摘要：The article deals with the effect of the critical flow,which is examined at pumping of the differential pumping chamber of the Environmental Scanning Electron Microscope (ESEM). The article compares the state of the flow in the area of pumped chamber at pressure ratio on the apertures when the critical flow occurs and its advantages in design of the chambers versus the flow without the clogging the nozzle. Problematics were solved using finite volume method by Ansys Fluent system.
关键词：Ansys Fluent;differentially pumped chamber;ESEM;SolidWorks.