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标题：Modeling a Pull-In Instability in Micro-Machined Hybrid Contactless Suspension
其他标题：Modeling a Pull-In Instability in Micro-Machined Hybrid Contactless Suspension
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作者：Kirill V. Poletkin ; Jan G. Korvink
期刊名称：Actuators
电子版ISSN：2076-0825
出版年度：2018
卷号：7
期号：1
页码：11
DOI：10.3390/act7010011
出版社：MDPI Publishing
摘要：A micro-machined hybrid contactless suspension, in which a conductive proof mass is inductively levitated within an electrostatic field, is studied. This hybrid suspension has the unique capability to control the stiffness, in particular along the vertical direction, over a wide range, which is limited by a pull-in instability. A prototype of the suspension was micro-fabricated, and the decrease of the vertical component of the stiffness by a factor of 25% was successfully demonstrated. In order to study the pull-in phenomenon of this suspension, an analytical model was developed. Assuming quasi-static behavior of the levitated proof mass, the static and dynamic pull-in of the suspension was comprehensively studied, also yielding a definition for the pull-in parameters of the hybrid suspension.
关键词：contactless suspension; magnetic levitation; pull-in; MEMS; stability; dynamics contactless suspension ; magnetic levitation ; pull-in ; MEMS ; stability ; dynamics