文章基本信息

标题：Stochastic Effects on the Dynamics of the Resonant Structure of a Lorentz Force MEMS Magnetometer
其他标题：Stochastic Effects on the Dynamics of the Resonant Structure of a Lorentz Force MEMS Magnetometer
本地全文：下载
作者：Mehrdad Bagherinia ; Stefano Mariani
期刊名称：Actuators
电子版ISSN：2076-0825
出版年度：2019
卷号：8
期号：2
页码：36
DOI：10.3390/act8020036
出版社：MDPI Publishing
摘要：Resonance features of slender mechanical parts of Lorentz force MEMS magnetometers are affected by the (weakly) coupled thermo-electro-magneto-mechanical multi-physics governing their dynamics. We recently showed that reduced-order models for such parts can be written in the form of the Duffing equation, whose nonlinear term stems from the mechanical constraint on the vibrations and is affected by the driving voltage. As some device performance indices vary proportionally to the amplitude of oscillations at resonance, an optimization of the operational conditions may lead to extremely slender, imperfection-sensitive movable structures. In this work, we investigate the effects of imperfections on the mechanical response of a single-axis magnetometer. At the microscopic length-scale, imperfections are given in terms of uncertainties in the values of the over-etch depth and of the Young’s modulus of the vibrating polycrystalline silicon film. Their effects on the nonlinear structural dynamics are investigated through a Monte Carlo analysis, to show how the output of real devices can be scattered around the reference response trend.
关键词：MEMS; Lorentz force magnetometer; sensitivity to imperfections; Monte Carlo analysis; numerical homogenization MEMS ; Lorentz force magnetometer ; sensitivity to imperfections ; Monte Carlo analysis ; numerical homogenization