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标题：Modified U-shaped Microactuator with Compliant Mechanism Applied to a Microgripper
其他标题：Modified U-shaped Microactuator with Compliant Mechanism Applied to a Microgripper
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作者：Pedro Vargas-Chable ; Margarita Tecpoyotl-Torres ; Ramon Cabello-Ruiz 等
期刊名称：Actuators
电子版ISSN：2076-0825
出版年度：2019
卷号：8
期号：1
页码：28
DOI：10.3390/act8010028
出版社：MDPI Publishing
摘要：In this paper, a modified U-shaped micro-actuator with a compliant mechanism is proposed. It was analyzed with a uniform and modified thin arm, as well as a similar variation in the corresponding flexure, in order to observe the impact of the compliant lumped mechanism. The use of these compliant mechanisms implies an increment in the deformation and a reduction in the equivalent stress of 25% and 52.25%, respectively. This characterization was developed using the Finite Element Method (FEM) in ANSYS Workbench. The design, analysis and simulation were developed with Polysilicon. In this study, the following performance parameters were also analyzed: force and temperature distribution. This device is supplied with voltage from 0 V up to 3 V, at room temperature. The modified U-shaped actuator was applied in both arms of a microgripper, and to evaluate its electrothermal performance, a static structural analysis has been carried out in Ansys Workbench. The microgripper has an increment in deformation of 22.33%, an equivalent stress reduction of 50%, and a decrease in operation frequency of 10.8%. The force between its jaws is of 367 µN. This low level of force could be useful when sensitive particles are manipulated.
关键词：Polysilicon; electrothermal actuation; dimples; ANSYS Polysilicon ; electrothermal actuation ; dimples ; ANSYS