文章基本信息

标题：A new factor for fabrication technologies evaluation for silicon nanowire transistors
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作者：Yasir Hashim ; Mohammed Nazmus Shakib
期刊名称：TELKOMNIKA (Telecommunication Computing Electronics and Control)
印刷版ISSN：2302-9293
出版年度：2020
卷号：18
期号：5
页码：2597-2605
DOI：10.12928/telkomnika.v18i5.12121
出版社：Universitas Ahmad Dahlan
摘要：This paper reviews the fabrication technologies of silicon nanowire transistors (SiNWTs) and rapidly development in this area, as this paper presents various types of SiNWT structures, development of SiNWT properties and different applications until nowadays. This research provides a good comparison among fabrication technologies of SiNWTs depending on a new factor DIF, this factor depends on the size of channel and power consumption in channel. As a result of this comparison, the best technology to use in the future to fabricate silicon nano transistors for future ICs is AFM nanolithography.
关键词：AFM; IC; nanolithography; SiNWT; transistor;