文章基本信息

标题：CMOS-compatible a-Si metalenses on a 12-inch glass wafer for fingerprint imaging
本地全文：下载
作者：Ting Hu ; Qize Zhong ; Nanxi Li 等
期刊名称：Nanophotonics
印刷版ISSN：2192-8606
电子版ISSN：2192-8614
出版年度：2020
卷号：9
期号：4
页码：823-830
DOI：10.1515/nanoph-2019-0470
出版社：Walter de Gruyter GmbH
摘要：Metalenses made of artificial sub-wavelength nanostructures have shown the capability of light focusing and imaging with a miniaturized size. Here, we report the demonstration of mass-producible amorphous silicon metalenses on a 12-inch glass wafer via the complementary metal-oxide-semiconductor compatible process. The measured numerical aperture of the fabricated metalens is 0.496 with a focusing spot size of 1.26 μm at the wavelength of 940 nm. The metalens is applied in an imaging system to test the imaging resolution. The minimum bar of the resolution chart with a width of 2.19 μm is clearly observed. Furthermore, the same system demonstrates the imaging of a fingerprint, and proofs the concept of using metalens array to reduce the system size for future compact consumer electronics.
关键词：metasurface ; glass wafer ; metalens