文章基本信息

标题：Development, Characterization and Analysis of Quartz Tuning Fork Sensor for Atomic Force Microscope
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作者：Syed Basit Ali Shah ; Naveed Ullah ; M. Naeem Khan 等
期刊名称：International Journal of Innovative Research in Science, Engineering and Technology
印刷版ISSN：2347-6710
电子版ISSN：2319-8753
出版年度：2018
卷号：7
期号：7
页码：7838-7849
DOI：10.15680/IJIRSET.2018.70707033
出版社：S&S Publications
摘要：Quartz Tuning Forks (QTFs) have been used as substitute force detection sensors in various scanning probe microscopy experiments in place of Micromachined Cantilevers due to many advantageous properties, such as high Quality Factor, low cost, and exceptional mechanical stability. QTF is usually modeled as Butterworth-Van Dyke (BVD) equivalent circuit. However, QTF needs to be characterized before using it as a sensor. We devised a relatively simple method for the electrical characterization of QTF using a Dual Phase Lock-in Amplifier. Moreover, the vacuum canister is removed for attaching a sharp tip to it where it has been noted that the Quartz Tuning Fork exhibits a decrease in the Quality Factor mainly due to air resistance in ambient environment. There is no further investigation on the reduction in the Quality Factor of QTF. We carried out a series of experiments in the vacuum chamber and ambient air. We found a decline in the Quality Factor which is attributed to the irreversible damage caused while canister removal and environmental effects. Finally, we fabricated QTF sensor by attaching a sharp Tungsten tip that is electrochemically etched in NaOH solution. The QTF sensors were then checked for the Quality Factor, which was reduced significantly due to extra mass attachment but still was high enough to be used as a force detection sensor..