文章基本信息

标题：Analyzing the Trapezium Shaped Comb Drive Actuator
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作者：Mohita ; Seema
期刊名称：International Journal of Innovative Research in Science, Engineering and Technology
印刷版ISSN：2347-6710
电子版ISSN：2319-8753
出版年度：2018
卷号：7
期号：6
页码：6819-6827
DOI：10.15680/IJIRSET.2018.0706069
出版社：S&S Publications
摘要：The Large displacement comb actuators at low actuation voltage should employ large number of comb fingers, reduced distance between the combs and by increasing the width of the fingers. Polysilicon has been the dominant mechanical materials for MEMS fabrication (PDF) MEMS Electrostatic comb actuators with a novel trapezium comb shape produces less actuation voltage then regular rectangular shape.
关键词：Actuator; shaped Comb Drive; Capacitance;electrostatic microtweezers;