文章基本信息

标题：Si metasurface half-wave plates demonstrated on a 12-inch CMOS platform
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作者：Yuan Dong ; Zhengji Xu ; Nanxi Li 等
期刊名称：Nanophotonics
印刷版ISSN：2192-8606
电子版ISSN：2192-8614
出版年度：2020
卷号：9
期号：1
页码：149-157
DOI：10.1515/nanoph-2019-0364
出版社：Walter de Gruyter GmbH
摘要：Half-wave plate (HWP) is one of the key polarization controlling devices in optical systems. The conventional HWPs based on birefringent crystals are inherently bulky and difficult to be monolithically integrated with other optical components. In this work, metasurface-based HWPs with high compactness are demonstrated on a 12-inch silicon complementary metal-oxide-semiconductor platform. Three-dimensional finite difference time domain simulation is used to design the nanostructure and investigate the impact of fabrication process variation on the device performance. In addition, the cross- and co-polarization transmittance ( T _cross and T _co) of the HWPs located at different wafer locations are characterized experimentally. The peak T _cross and valley T _co values of 0.69 ± 0.053 and 0.032 ± 0.005 are realized at the wavelength around 1.7 μm, respectively. This corresponds to a polarization conversion efficiency of 95.6% ± 0.8%.
关键词：flat optics ; metasurface ; polarization control ; waveplate