文章基本信息

标题：Langmuir probe measurements of an RF driven high-density inductively coupled argon plasma
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作者：Weiyuan Ni ; Guicai Song ; Dongping Liu 等
期刊名称：IOP Conference Series: Earth and Environmental Science
印刷版ISSN：1755-1307
电子版ISSN：1755-1315
出版年度：2019
卷号：242
期号：2
页码：1-7
DOI：10.1088/1755-1315/242/2/022043
出版社：IOP Publishing
摘要：In this paper, a high-density inductively coupled argon plasma was generated by an RF power supply, and the plasma density, electron temperature, and plasma potential were measured by a Langmuir probe. It was found that the plasma density, electron temperature, and plasma potential along the quartz glass tube axial direction increased in the range of 0.37x10¹⁹-6.75x10¹⁹ m⁻³, 3.44-5.91 eV, and 11.92-20.09 V respectively, when the incident RF power increased from 3 kV to 8 kV at a gas pressure of 25 Pa. The maximum values of the plasma density and plasma potential appear in the position of coil center and the electron temperature in the coil region almost unchanged.