文章基本信息

标题：Two-color heterodyne laser interferometry for long-distance stage measurement with correction of uncertainties in measured optical distances
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作者：Zhaowu Liu ; Wenhao Li ; Bayanheshig 等
期刊名称：Scientific Reports
电子版ISSN：2045-2322
出版年度：2017
卷号：7
期号：1
DOI：10.1038/s41598-017-07741-4
语种：English
出版社：Springer Nature
摘要：We designed a new system that eliminates deviations by correcting uncertainty in optical distance measurements in the laser two-color heterodyne interferometer. In simulations, eliminating the uncertainty from the atmosphere, the deviation in the uncertainty of the optical distance was 50 times greater with the two-color method than with the one-color method. Adding a correction arm reduces the deviation caused by the uncertainties in measured optical distances. The uncertainty in the measured path length is reduced to 20 nm over a path length of 1500 mm, giving a relative uncertainty of 1.34 × 10 (-8).