文章基本信息

标题：Fabrication-constrained nanophotonic inverse design
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作者：Alexander Y. Piggott ; Jan Petykiewicz ; Logan Su 等
期刊名称：Scientific Reports
电子版ISSN：2045-2322
出版年度：2017
卷号：7
期号：1
DOI：10.1038/s41598-017-01939-2
语种：English
出版社：Springer Nature
摘要：A major difficulty in applying computational design methods to nanophotonic devices is ensuring that the resulting designs are fabricable. Here, we describe a general inverse design algorithm for nanophotonic devices that directly incorporates fabrication constraints. To demonstrate the capabilities of our method, we designed a spatial-mode demultiplexer, wavelength demultiplexer, and directional coupler. We also designed and experimentally demonstrated a compact, broadband 1 × 3 power splitter on a silicon photonics platform. The splitter has a footprint of only 3.8 × 2.5 μm, and is well within the design rules of a typical silicon photonics process, with a minimum radius of curvature of 100 nm. Averaged over the designed wavelength range of 1400-1700 nm, our splitter has a measured insertion loss of 0.642 ± 0.057 dB and power uniformity of 0.641 ± 0.054 dB.