文章基本信息

标题：Comb-referenced laser distance interferometer for industrial nanotechnology
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作者：Yoon-Soo Jang ; Guochao Wang ; Sangwon Hyun 等
期刊名称：Scientific Reports
电子版ISSN：2045-2322
出版年度：2016
卷号：6
期号：1
DOI：10.1038/srep31770
语种：English
出版社：Springer Nature
摘要：A prototype laser distance interferometer is demonstrated by incorporating the frequency comb of a femtosecond laser for mass-production of optoelectronic devices such as flat panel displays and solar cell devices. This comb-referenced interferometer uses four different wavelengths simultaneously to enable absolute distance measurement with the capability of comprehensive evaluation of the measurement stability and uncertainty. The measurement result reveals that the stability reaches 3.4 nm for a 3.8 m distance at 1.0 s averaging, which further reduces to 0.57 nm at 100 s averaging with a fractional stability of 1.5 × 10(-10). The uncertainty is estimated to be in a 10(-8) level when distance is measured in air due to the inevitable ambiguity in estimating the refractive index, but it can be enhanced to a 10(-10) level in vacuum.