文章基本信息

标题：Controlled Scalable Synthesis of Uniform, High-Quality Monolayer and Few-layer MoS2 Films
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作者：Yifei Yu ; Chun Li ; Yi Liu 等
期刊名称：Scientific Reports
电子版ISSN：2045-2322
出版年度：2013
卷号：3
期号：1
DOI：10.1038/srep01866
语种：English
出版社：Springer Nature
摘要：Two dimensional (2D) materials with a monolayer of atoms represent an ultimate control of material dimension in the vertical direction. Molybdenum sulfide (MoS₂) monolayers, with a direct bandgap of 1.8 eV, offer an unprecedented prospect of miniaturizing semiconductor science and technology down to a truly atomic scale. Recent studies have indeed demonstrated the promise of 2D MoS₂ in fields including field effect transistors, low power switches, optoelectronics, and spintronics. However, device development with 2D MoS₂ has been delayed by the lack of capabilities to produce large-area, uniform, and high-quality MoS₂ monolayers. Here we present a self-limiting approach that can grow high quality monolayer and few-layer MoS₂films over an area of centimeters with unprecedented uniformity and controllability. This approach is compatible with the standard fabrication process in semiconductor industry. It paves the way for the development of practical devices with 2D MoS₂ and opens up new avenues for fundamental research.