文章基本信息

标题：Displacement mechanical amplifiers designed on poly-silicon
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作者：Ramon Cabello-Ruiz ; Ramon Cabello-Ruiz ; Margarita Tecpoyotl-Torres 等
期刊名称：International Journal of Electrical and Computer Engineering
电子版ISSN：2088-8708
出版年度：2019
卷号：9
期号：2
页码：894-901
DOI：10.11591/ijece.v9i2.pp894-901
出版社：Institute of Advanced Engineering and Science (IAES)
摘要：Using Poly-Silicon, the implementation of novel Displacement-amplifying Compliant Mechanisms (DaCM), in two geometries of accelerometers, allows for remarkable improvements in their operation frequency and displacement sensitivity, with different proportions. Similar DaCM´s geometries were previously implemented by us with Silicon. In all mentioned cases, the geometries of DaCM´s are adjusted in order to use them with Conventional Capacitive Accelerometer (CCA) and Capacitive Accelerometer with Extended Beams (CAEB), which operate in-plane mode, (y-axis). It should be noted that CAEB shows improvements (95.33%) in displacement sensitivity compared to ACC. Simulations results, carried out using Ansys Workbench software, validate the system’s performance designed with Poly-Silicon. Finally, a comparison with the similar systems, previously designed with Silicon, is also carried out.
关键词：Accelerometer;Compliant mechanisms;Frequency;MEMS;Sensitivity
其他关键词：compliant mechanisms;sensitivity;frequency;accelerometer;MEMS