文章基本信息

标题：High quality self-separated GaN crystal grown on a novel nanoporous template by HVPE
本地全文：下载
作者：Qin Huo ; Yongliang Shao ; Yongzhong Wu 等
期刊名称：Scientific Reports
电子版ISSN：2045-2322
出版年度：2018
卷号：8
期号：1
页码：3166
DOI：10.1038/s41598-018-21607-3
语种：English
出版社：Springer Nature
摘要：(TEMGA) templates were utilized to grow GaN crystals by hydride vapor phase epitaxy (HVPE) method. The GaN crystals were separated spontaneously from the TEMGA template with the assistance of voids formed by the etched nanopores. Several techniques were utilized to characterize the quality of the free-standing GaN crystals obtained from the TEMGA template. Results showed that the quality of the as-obtained GaN crystals was improved obviously compared with those grown on the MGA. This convenient technique can be applied to grow high-quality free-standing GaN crystals.