文章基本信息

标题：Ion Sputter Induced Interfacial Reaction in Prototypical Metal-GaN System
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作者：Rong Huang ; Fangsen Li ; Tong Liu 等
期刊名称：Scientific Reports
电子版ISSN：2045-2322
出版年度：2018
卷号：8
期号：1
页码：8521
DOI：10.1038/s41598-018-26734-5
语种：English
出版社：Springer Nature
摘要：components were also detected due to the reaction between metal Ti and surface-adsorbed C species. Our study reveals that the corresponding core level binding energy and peak intensity obtained from ion sputter depth profile should be treated with much caution, since they will be changed due to ion-induced interface reactions and formation of by-products during ion bombardment.