文章基本信息

标题：Three-dimensional chemical mapping using non-destructive SEM and photogrammetry
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作者：Lionel C. Gontard ; Moisés Batista ; Jorge Salguero 等
期刊名称：Scientific Reports
电子版ISSN：2045-2322
出版年度：2018
卷号：8
期号：1
页码：11000
DOI：10.1038/s41598-018-29458-8
语种：English
出版社：Springer Nature
摘要：The slice and view approach in electron microscopy defines an ensemble of destructive techniques that is widely used for studying in 3D the structure and chemistry of samples with dimensions ranging from µm to mm. Here, a method is presented for measuring with high resolution and quantitatively the morphology and chemical composition of the surface of a sample in 3D. It is non-destructive and therefore, it is complementary to slice and view methods. The scheme is based on the fusion of conventional scanning electron microscopy (SEM) imaging, multi-view photogrammetry and compositional mapping using energy dispersive X-ray spectroscopy (EDXS). We demonstrate its potential by performing an accurate study of adhesion wear of a tungsten carbide tool that is difficult to obtain using conventional characterization techniques.