摘要：The evolution of microelectronic technologies is giving constant impulse to advanced micro-scaled systems which perform complex operations. In fact, the actual micro and nano Electro-Mechanical Systems (MEMS/NEMS) easily integrate information-gathering and decision-making electronics together with all sorts of sensors and actuators. Mechanical manipulation can be obtained through microactuators, taking advantage of magnetostrictive, thermal, piezoelectric or electrostatic forces. Electrostatic actuation, more precisely the comb-drive approach, is often employed due to its high versatility and low power consumption. Moreover, the device design and fabrication process flow can be simplified by compliant mechanisms, avoiding complex elements and unorthodox materials. A nano-scaled rotary comb drive is herein introduced and obtained using NEMS technology, with an innovative design which takes advantages of the compliant mechanism characteristics. A theoretical and numerical study is also introduced to inspect the electro-mechanical behavior of the device and to describe a new technological procedure for its fabrication.
关键词：microactuation; nanoactuation; comb drives; flexure hinge; nanofabrication; electron beam lithography microactuation ; nanoactuation ; comb drives ; flexure hinge ; nanofabrication ; electron beam lithography
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