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标题：Production of Low Electron-Temperature and High Density Plasma by Using a Grid-Cage Electrode for RF Discharge
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作者：Kohgi Kato ; Takuma Gohda ; Satoru Iizuka 等
期刊名称：Journal of Scientific Research and Reports
电子版ISSN：2320-0227
出版年度：2016
卷号：11
期号：2
页码：1-9
DOI：10.9734/JSRR/2016/26362
出版社：Sciencedomain International
摘要：An original method for producing low electron temperature and high electron density plasma was studied experimentally by using a rectangular grid-cage as a capacitively-coupled powered electrode in a radio frequency (RF) discharge. A rectangular grid-cage electrode was placed on a side wall of a grounded cubic-box chamber of 15x15x15 cm³in volume. The cubic chamber was situated in a stainless steel vacuum chamber 60 cm in diameter and 100 cm long. An argon plasma was generated by a 40 MHz power source in a pressure range of 2.0 ~ 6.7 Pa. RF power P _RF of 5 ~ 60 W was supplied to the grid-cage electrode directly through an impedance matching circuits with a dc blocking capacitor for efficient plasma production. The electron temperature T _e and electron density n _ewere found to be strongly dependent on a mesh size of grid-cage electrodes. If the mesh of the grid-cage was fine, T _e decreased, while n _e increased, compared with those in the case of a coarse grid-cage electrode. By using a fine grid-electrode, T _e dropped down to 0.5 eV, while n _e reached up to 1.62x10¹¹cm^-3 at the center of the cubic discharge chamber of 15x15x15 cm³ under argon pressure of 2.0 Pa and RF power of 60 W. This discharge method easily provides low electron temperature and high density plasmas under the continuous RF discharge.
关键词：Low electron-temperature plasma; high density plasma; low space potential; grid-cage electrode; RF discharge.