文章基本信息

标题：A Review on Emerging Digital Micromirror for Various Applications
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作者：Laxmi ; Nisha Raheja
期刊名称：International Journal of Innovative Research in Science, Engineering and Technology
印刷版ISSN：2347-6710
电子版ISSN：2319-8753
出版年度：2017
卷号：6
期号：5
页码：8661
DOI：10.15680/IJIRSET.2017.0605225
出版社：S&S Publications
摘要：Micro Mirror .have a wide range of applications in automotive, biomedical, defense, aerospace,multimedia, communication and consumer electronic systems. One of the most important features that differentiateMEMS from traditional CMOS electronics is the presence of suspended and/or moving parts with air gaps or cavities inthe device structure. This fact imposes severe challenges to the packaging and reliability of MEMS device.a singlecrystallinesilicon (SCS) micromirror used for laser beam scanning in an endoscopic optical coherence tomography(OCT) system. The micromirror is fabricated by using a deep reactive-ion-etch (DRIE) post-CMOS micromachiningprocess. a Micromirror model is simulated using COMSOL Multiphysics, the results obtained from the simulation helpto reduce .fabrication of MEMS Micro mirror. a Mems based rectangle shape Micro mirror with four straightcentilevers using COMSOL Multi physics. Research is carried out to design a micro mirror to reduce lift off stress. asquare shape micro-mirror with the lift-off of the structure used four springs simulating a prestressed cantilever beam.Few base materials were introduced such as Alumina, Aluminum 3003 H18, Aluminum 6063 T18, Copper andAluminum. To make the leg or cantilever more efficient the structural steel was introduced.
关键词：cavities; endoscopic optical coherence tomography; micromachining; centile.