文章基本信息

标题：Levitating Micro-Actuators: A Review
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作者：Kirill V. Poletkin ; Asa Asadollahbaik ; Ronald Kampmann 等
期刊名称：Actuators
电子版ISSN：2076-0825
出版年度：2018
卷号：7
期号：2
页码：17
DOI：10.3390/act7020017
语种：English
出版社：MDPI Publishing
摘要：Through remote forces, levitating micro-actuators completely eliminate mechanical attachment between the stationary and moving parts of a micro-actuator, thus providing a fundamental solution to overcoming the domination of friction over inertial forces at the micro-scale. Eliminating the usual mechanical constraints promises micro-actuators with increased operational capabilities and low dissipation energy. Further reduction of friction and hence dissipation by means of vacuum leads to dramatic increases of performance when compared to mechanically tethered counterparts. In order to efficiently employ the benefits provided by levitation, micro-actuators are classified according to their physical principles as well as by their combinations. Different operating principles, structures, materials and fabrication methods are considered. A detailed analysis of the significant achievements in the technology of micro-optics, micro-magnets and micro-coil fabrication, along with the development of new magnetic materials during recent decades, which has driven the creation of new application domains for levitating micro-actuators is performed.
关键词：MEMS; micro-systems; micro-actuators; electric levitation; optical levitation; magnetic levitation; diamagnetic levitation; superconducting levitation; hybrid levitation MEMS ; micro-systems ; micro-actuators ; electric levitation ; optical levitation ; magnetic levitation ; diamagnetic levitation ; superconducting levitation ; hybrid levitation