文章基本信息

标题：A reliability model for a wafer FAB
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作者：Joong S. Jang ; Sang C. Park ; Chaoqun Wu 等
期刊名称：Cogent Engineering
电子版ISSN：2331-1916
出版年度：2017
卷号：4
期号：1
页码：1340817
DOI：10.1080/23311916.2017.1340817
语种：English
出版社：Taylor and Francis Ltd
摘要：Abstract Proposed in this paper is a new reliability model for a wafer fabrication plant (FAB). The reliability prediction of a FAB is essential for various activities; feasibility evaluation, comparing competing designs, identifying potential reliability problems, planning maintenance and logistic support strategies, and input to other studies such as life-cycle cost analysis or order selection. The conventional reliability model, however, is not appropriate for a FAB because of inherent attributes of the manufacturing system; concurrent production of various products, reentrant material flows, and the recipe arrangement problem. To overcome this problem, this paper proposes a new reliability model of a FAB consisting of three reliability functions; reliability function of an entire FAB, reliability functions of tool groups, and reliability functions of FAB tools. To demonstrate the proposed reliability model, a simulation model is constructed based on a wafer FAB data-set. The simulation experiments are carried out with commercial software MOZART®.
关键词：reliability model ; FAB ; failure rate ; reliability function ; simulation