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标题：COMPARATIVE ANALYSIS OF MEMS CAPACITIVE PRESSURE SENSOR FOR DETECTION OF TREMORS IN PARKINSON�S DISEASE
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作者：GRK PRASAD ; N.SIDDAIAH.M ; PREETI.M K.SRINIVASA RAO 等
期刊名称：Journal of Theoretical and Applied Information Technology
印刷版ISSN：1992-8645
电子版ISSN：1817-3195
出版年度：2017
卷号：95
期号：9
出版社：Journal of Theoretical and Applied
摘要：In this paper, we are proposing a novel high sensitive, more reliable structure for an accelerometer sensor with silicon material which detects the resting tremor (continues tremor or Pill rolling tremor) of a patient suffering from Parkinson�s Disease. The essential tremor frequency is from 3Hz to 7Hz. The Proposed structure is simulated using COMSOL Multi Physics 5.0 CAD tool and results are compared with the different shaped proof mass with different materials of a moving part of sensor. The minimum range of Eigen frequency that the proposed structure got 2.3572Hz and the maximum range is 8.679Hz with a displacements of 1.04μm to 2.74 μm. It is evident that now a days only the clinical based tests are the conventional tests to detect the severity of the tremor for Parkinson�s Disease as per the UPDRS. In this paper we are proposing the new methodology to detect the resting tremor of Patient which is the initial symptom of the Parkinson�s Disease. It is clear from the results that the Silicon material for proof mass gives the best sensitivity values when compared to all the materials of polymers. The capacitive actuation technique is proposed in this paper to identify the output capacitance and voltage because it gives high sensitivity and accuracy and reliability.
关键词：Essential Tremor; Proof Mass; Parkinson�s Disease; UPDRS; Capacitive Actuation