文章基本信息

标题：BiCMOSプロセスを用いた発光素子集積型イメージセンサの基礎検討
本地全文：下载
作者：太田淳 ; 飯盛慶一 ; 中山裕勝等
期刊名称：映像情報メディア学会誌
印刷版ISSN：1342-6907
电子版ISSN：1881-6908
出版年度：2003
卷号：57
期号：3
页码：378-383
DOI：10.3169/itej.57.378
出版社：The Institute of Image Information and Television Engineers
摘要：We have fabricated and demonstrated fundamental characteristics of an image sensor integrated with Si-LED using standard S1Ge-B1CMOS process technology Two types of LEDs, avalanche and Zener, were fabricated, in terms of breakdown mode The avalanche type LED was found to have better emission efficiency. We also studied the dependence of the distance between LED and APS on the discharge characteristics of the APS and found that over 500 ii m is required to suppress the effect from the LED
关键词：Si-LED;イメーシセンサ;Active Pixel Sensor;発光素子;BiCMOSプロセス