摘要：A manufacturing process for a planar binary lambda sensor is shown. By joining the heating and the sensing components via glass soldering with a joining temperature of 850 °C, a laboratory platform has been established that allows the manufacturing of two independent parts in high-temperature co-fired ceramics technology (HTCC) with electrodes that are post-processed at lower temperatures, as is required for mixed-potential sensors. The final device is compared to a commercial sensor with respect to its sensing performance. Important processes and possible origins of problems as well as their solutions during sensor development are shown, including heater design and joining process.
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