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标题：INTELLIGENCE INTEGRATION OF PARTICLE SWARM OPTIMIZATION AND PHYSICAL VAPOUR DEPOSITION FOR TiN GRAIN SIZE COATING PROCESS PARAMETERS
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作者：MU�ATH IBRAHIM JARRAH ; ABDUL SYUKOR MOHAMAD JAYA ; MOHD ASYADI AZAM 等
期刊名称：Journal of Theoretical and Applied Information Technology
印刷版ISSN：1992-8645
电子版ISSN：1817-3195
出版年度：2016
卷号：84
期号：3
出版社：Journal of Theoretical and Applied
摘要：Due to increasing complexity of industrial production, decisions regarding selection of coating parameters importantly influence the level of production, Optimization of thin film coating parameters is important in identifying the required output. Two main issues of the process of physical vapor deposition (PVD) are manufacturing costs and customization of cutting tool properties. The aim of this study is to identify optimal PVD coating process parameters. Three process parameters were selected, namely nitrogen gas pressure (N2), argon gas pressure (Ar), and Turntable Speed (TT), while thin film grain size of titanium nitrite (TiN) was selected as an output response. Coating grain size was characterized using Atomic Force Microscopy (AFM) equipment. In this paper, to obtain a proper output result, a developed quadratic polynomial model equation which represents the process variables and coating grain size was used in order to optimize the coating process parameters, particle swarm optimization (PSO) was used for optimization work. Finally, the models were validated using actual testing data to measure model performances in terms of residual error and prediction interval (PI). The result indicated that for response surface methodology (RSM), the actual coating grain size of validation runs data fell within the 95% (PI) and the residual errors were less than 10 nm with very low values, the prediction accuracy of the model is 96.09%. In terms of optimization and reduction the experimental data, PSO could get the best lowest value for grain size than experimental data with reduction ratio of ≈6%.
关键词：TiN; Grain Size; Modeling; Sputtering; PVD; RSM; PSO.