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标题：PERFORMANCE ENHANCEMENT OF A SILICON MEMS PIEZORESISTIVE SINGLE AXIS ACCELEROMETER WITH ELECTROPLATED GOLD ON A PROOF MASS
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作者：R.VARATHARAJAN ; A.ANGELIN PEACE PREETHI
期刊名称：Journal of Theoretical and Applied Information Technology
印刷版ISSN：1992-8645
电子版ISSN：1817-3195
出版年度：2014
卷号：67
期号：3
出版社：Journal of Theoretical and Applied
摘要：This paper presents realization of MEMS piezoresistive single axis accelerometer with electroplated gold on the proof mass. The piezoresistive accelerometer shows very high sensitivity and good linearity. But performance behavior of the system shows precise effect due to cross axes sensitivity. Performance enhancement is achieved by electroplating a gold mass on top of the proof mass of dimension 2500�m X 2500�m X 30�m. This paper explains the simulation analysis using ANSYS11� and design optimization of the accelerometer structures without gold, with electroplated gold on top of the proof mass and with electroplated gold on bottom of the proof mass. From these structures, prime axis stress sensitivity, cross axes stress sensitivity and displacement of the structures have been analyzed. Test result of these devices shows that the prime axis stress sensitivity of electroplated gold with top of the proof mass is increased by 53% and the structure with top of the proof mass is increased by 49% as compared to the structure without gold. Cross axes stress sensitivity of the structure with gold on top of the proof mass along the X, Y axis is reduced by 17% and 15% with the structure without gold.
关键词：MEMS piezoresistive accelerometer; sensitivity; linearity; ANSYS software