文章基本信息

标题：A METHOD OF MICRO-SPHERE COMPLETE POSITION BASE ON PERPENDICULAR AXIS AND POSITIONING ACCURACY ANALYSIS
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作者：ZHAO XUESEN ; GAO DANGZHONG ; MA XIAOJUN 等
期刊名称：Journal of Theoretical and Applied Information Technology
印刷版ISSN：1992-8645
电子版ISSN：1817-3195
出版年度：2013
卷号：47
期号：1
页码：171-175
出版社：Journal of Theoretical and Applied
摘要：The vacuum adsorption is one of the most effective ways to handle micro sphere. To position a certainly place on micro sphere�s surface, the positioning principle realized by double shafting was firstly analyzed. A system combined with the atomic force microscope (AFM), the precision rotating air-bearing, assistant transform shaft, translation stage and vacuum adsorption devices was developed. Then the micro tube to adsorb the micro sphere was fabricated, and the positioning error was also analyzed with a positioning accuracy of approximately less than 5 degrees. Finally, the surface positioning experiment was carried out which indicated its feasibility. This method and device can also realize some surface traces on micro sphere during circumferential measurement and micro-machining.
关键词：Micro Sphere; Vacuum Adsorption; AFM; Perpendicular Axis; Positioning Accuracy