首页    期刊浏览 2024年12月13日 星期五
登录注册

文章基本信息

  • 标题:Localization and Imaging of Integrated Circuit Defect Using Simple Optical Feedback Detection
  • 本地全文:下载
  • 作者:Vernon Julius Cemine ; Bernardino Buenaobra ; Carlo Mar Blanca
  • 期刊名称:Science Diliman
  • 印刷版ISSN:2012-0818
  • 出版年度:2007
  • 卷号:16
  • 期号:2
  • 语种:English
  • 出版社:OVCRD
  • 摘要:High-contrast microscopy of semiconductor and metal edifices in integrated circuits is demonstrated by combining laser-scanning confocal reflectance microscopy, one-photon optical-beam-induced current (1P-OBIC) imaging, and optical feedback detection via a commercially available semiconductor laser that also serves as the excitation source. The confocal microscope has a compact in-line arrangement with no external photodetector. Confocal and 1P-OBIC images are obtained simultaneously from the same focused beam that is scanned across the sample plane. Image pairs are processed to generate exclusive high-contrast distributions of the semiconductor, metal, and dielectric sites in a GaAs photodiode array sample. The method is then utilized to demonstrate defect localization and imaging in an integrated circuit.
国家哲学社会科学文献中心版权所有