文章基本信息

标题：A Sputtering Deposition of Al Enhances the Output Reproducibility in a Conducting Rubber Force Sensor
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作者：Masato Ohmukai ; Yasushi Kami
期刊名称：Journal of Sensor Technology
印刷版ISSN：2161-122X
电子版ISSN：2161-1238
出版年度：2016
卷号：06
期号：03
页码：46-55
DOI：10.4236/jst.2016.63004
语种：English
出版社：Scientific Research Publishing
摘要：Compressive force sensors or pressure sensors are indispensable to tactile sensors in humanoid robots. It is investigated that low-cost electro-conducting rubber sheets are applied to the force sensor, of which the biggest problem is its poor reproducibility. It was found that the aluminum deposition by a vacuum evaporation method shows excellent characteristics but suffers deterioration by a radiation heating effect. The aluminum electrode was deposited by a sputtering method, known to have an advantage of a low-temperature method, and the reproducibility of the output was improved.
关键词：Conducting Rubber;Force Sensor;Electrode;Magnetron Sputtering;Reproducibility