文章基本信息

标题：Application of thin molybdenum films in contact masks for manufacturing the micro-relief of diffractive optical elements
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作者：A.V. Volkov ; O.Yu. Moiseev ; S.D. Poletaev 等
期刊名称：Computer Optics / Компьютерная оптика
印刷版ISSN：0134-2452
电子版ISSN：2412-6179
出版年度：2014
卷号：38/4
期号：8401
页码：757-762
语种：Russian
出版社：Samarskii Natsional'nyi Issledovatel'skii Universitet imeni Akademika S.P. Koroleva,Samara National Research University
摘要：We investigate the parameters of microstructures obtained by laser thermochemical writing in molybdenum films of thickness 17, 35, and 70 nm deposited on glass and quartz substrates. Graphs of the spatial resolution of the microstructures as a function of the laser power are plotted for different substrate materials. It is shown that a higher spatial resolution of the microstructures can be achieved in the molybdenum films with a 17-nm thickness.