文章基本信息

标题：Micro- and nanocoordinate measurements of micro-parts with 3-D tunnelling current probing
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作者：Schuler, A. ; Hausotte, T. ; Sun, Z. 等
期刊名称：Journal of Sensors and Sensor Systems
印刷版ISSN：2194-8771
电子版ISSN：2194-878X
出版年度：2015
卷号：4
期号：1
页码：199-208
DOI：10.5194/jsss-4-199-2015
语种：English
出版社：Copernicus Publications
摘要：Measurement tasks of modern micro- and nanometrology are posing a problem for current measurement instruments with decreasing structure sizes and rising aspect ratios. There is an open requirement for nanometre-resolving 3-D capable sensors and corresponding 3-D positioning systems to operate the sensors for 3-D measurements. A 3-D probing system based on electrical interaction is presented which is operated on a nanopositioning system type SIOS NMM-1. Furthermore, we demonstrate the progress and new possibilities for 3-D measurements with the nanopositioning and nanomeasurement machine NMM-1 and also with the application of a rotary kinematic chain. In addition new 3-D measurement routines for the NMM-1, also for micro-tactile probing systems as well as current plans, are shown.