文章基本信息

标题：Design, Fabrication and Working of In-House Spin Coating Unit for Thin Film Deposition
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作者：C.Thirunavukkarasu ; K.K. Saranya ; B.Janarthanan 等
期刊名称：International Journal of Innovative Research in Science, Engineering and Technology
印刷版ISSN：2347-6710
电子版ISSN：2319-8753
出版年度：2016
卷号：5
期号：6
页码：10017
DOI：10.15680/IJIRSET.2015.0506068
出版社：S&S Publications
摘要：This paper attempts to design and fabricate a spin coating unit with locally available materials for thedeposition of thin films over a glass substrate. The proposed unit is constructed with high speed DC motor, spinningdisk, substrate holder, regulated power supply, chuck etc. The thickness of the thin film is influenced by the spinningrate as expected and the spinning rate of the proposed unit varies between 200-6500 rpm. The unit is tested to coatZnO thin film on glass substrate and results confirm the dependence of thickness of the thin film on the spin speed.
关键词：Spin coating; RPM; spin speed; ZnO thin film