文章基本信息

标题：The Fabrication of A MEMS-based Translational Vibratory Z-Axis Gyroscope Using DRIE on the Surface and Anisotropic Etching on the Backside of the Stan
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作者：Tris Dewi Indraswati ; Adang Suwandi Ahmad ; Irman Idris 等
期刊名称：International Journal on Electrical Engineering and Informatics
印刷版ISSN：2085-6830
出版年度：2013
卷号：5
期号：4
DOI：10.15676/ijeei.2013.5.4.1
出版社：School of Electrical Engineering and Informatics
摘要：A new fabrication process of MEMS structure prototype of a translationalvibratory z-axis gyroscope sensing element is presented. This structure consists of proofmass, driving devices, sensing devices, and suspensions, using the combination ofMEMS bulk and surface technology with DRIE etching techniques on the surface and asuspended structure formation using anisotropic etching on the backside of the standardSOI wafer. The mask for the fabrication process was designed using L-Edit software.With this technique, the capacitance and the mass of proof mass can be increased thusincreasing the gyroscope sensitivity to sense the Coriolis force. The MEMS-basedtranslational vibratory z-axis gyroscope was static characterized by SEM measurements,visually and resistance measurement, wiring checking, and vibration checking by agiven acoustic wave gyroscope excitation.
关键词：MEMS-based translational vibratory z-axis gyroscope; coriolis;force; MEMS technology; standard SOI wafer; angular movements.