文章基本信息

标题：다결정 실리콘 Self-align에 의한 바이폴라 트랜지스터의 제작
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作者：Chae, Sang-Hun ; Gu, Jin-Geun ; Kim, Jae-Ryeon 等
期刊名称：ETRI Journal
印刷版ISSN：1225-6463
电子版ISSN：2233-7326
出版年度：1985
卷号：7
期号：4
页码：11-14
语种：Korean
出版社：Electronics and Telecommunications Research Institute
摘要：A polysilicon self-aligned bipolar n-p-n transistor structure is described, which can be used in high speed and high packing density LSI circuits The emitter of this transistor is separated less than with base contact by polysilicon self-align technology. Through all the process, the active region of this device is not damaged. therefore a high performance device is obtained. Using the transistor with design rules, a CML ring oscillator has per-gate minimum propagation delay time of 400 ps at 2.7 mW power consumption condition.