文章基本信息

标题：Athermalized Polymeric Arrayed-Waveguide Grating by Partial Detachment from a Si Substrate
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作者：Lee, Jong-Moo ; Ahn, Joon-Tae ; Park, Sun-Tak 等
期刊名称：ETRI Journal
印刷版ISSN：1225-6463
电子版ISSN：2233-7326
出版年度：2004
卷号：26
期号：3
页码：281-281
语种：English
出版社：Electronics and Telecommunications Research Institute
摘要：We demonstrate a new fabrication method for adjusting the temperature dependence of a polymeric arrayed-waveguide grating (AWG) on a Si substrate. A temperature-dependent wavelength shift of-0.1nm/ in a polymeric AWG on a Si substrate is reduced of+0.1nm/ by detaching part of the polymer film, including the grating channel region of the AWG, from the Si substrate while the other parts remain fixed on the substrate.
关键词：waveguide;polymer;AWG