文章基本信息

标题：Nanogap Array Fabrication Using Doubly Clamped Freestanding Silicon Nanowires and Angle Evaporations
本地全文：下载
作者：Yu, Han-Young ; Ah, Chil-Seong ; Baek, In-Bok 等
期刊名称：ETRI Journal
印刷版ISSN：1225-6463
电子版ISSN：2233-7326
出版年度：2009
卷号：31
期号：4
页码：351-356
DOI：10.4218/etrij.09.0109.0006
语种：English
出版社：Electronics and Telecommunications Research Institute
摘要：We present a simple semiconductor process to fabricate nanogap arrays for application in molecular electronics and nano-bio electronics using a combination of freestanding silicon nanowires and angle evaporation. The gap distance is modulated using the height of the silicon dioxide, the width of the Si nanowires, and the evaporation angle. In addition, we fabricate and apply the nanogap arrays in single-electron transistors using DNA-linked Au nanoparticles for the detection of DNA hybridization.
关键词：Nanogap;freestanding nanowires;angle evaporation