文章基本信息

标题：Gold Stripe Optical Waveguides Fabricated by a Novel Double-Layered Liftoff Process
本地全文：下载
作者：Kim, Jin-Tae ; Park, Sun-Tak ; Park, Seung-Koo 等
期刊名称：ETRI Journal
印刷版ISSN：1225-6463
电子版ISSN：2233-7326
出版年度：2009
卷号：31
期号：6
页码：778-783
DOI：10.4218/etrij.09.1209.0042
语种：English
出版社：Electronics and Telecommunications Research Institute
摘要：To fabricate uniform and reliable thin gold stripes that provide low-loss optical waveguides, we developed a novel liftoff process placing an additional layer under conventional photoresists. By patterning a photoresist and over-etching the , the photoresist patterns become free-standing structures on a lower-cladding. This leads to uniform metal stripes with good reproducibility and effectively removes parasitic structures on the edge of the metal stripe in the image reversal photolithography process. By applying the newly developed process to polymer-based gold stripe waveguide fabrication, we improved the propagation losses about two times compared with that incurred by the conventional image-reversal process.
关键词：Surface plasmons;polaritons;metal stripe;polymer waveguide