文章基本信息

标题：Pressure Control Organic Vapor Deposition Methods for Fabricating Organic Thin-Film Transistors
本地全文：下载
作者：Ahn, SeongDeok ; Kang, Seong Youl ; Oh, Ji Young 等
期刊名称：ETRI Journal
印刷版ISSN：1225-6463
电子版ISSN：2233-7326
出版年度：2012
卷号：34
期号：6
页码：970-973
DOI：10.4218/etrij.12.0212.0266
语种：English
出版社：Electronics and Telecommunications Research Institute
摘要：In this letter, we report on the development progress of a pressure control organic vapor deposition (PCOVD) technology used to design and build a large area deposition system. We also investigate the growth characteristics of a pentacene thin film by PCOVD. Using the PCOVD method, the mobility and on/off current ratio of an organic thin-film transistor (OTFT) on a plastic substrate are and , respectively. The developed OTFT can be applied to a flexible display on a plastic substrate.
关键词：PCOVD;pentacene;OTFT;plastic substrate