文章基本信息

标题：Nanogranular TiN-ZrO₂ intermediate layer induced improvement of isolation and grain size of FePt thin films
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作者：K. F. Dong ; H. H. Li ; Y. G. Peng 等
期刊名称：Scientific Reports
电子版ISSN：2045-2322
出版年度：2014
卷号：4
DOI：10.1038/srep05607
出版社：Springer Nature
摘要：The effects of TiN-ZrO₂ intermediate layer on the microstructures and magnetic properties of FePt films were investigated. The TiN-ZrO₂ intermediate layer was granular consisting of grains of solid solution of Ti(Zr)ON segregated by amorphous ZrO₂. By doping ZrO₂ into TiN intermediate layer, the FePt grains became better isolated from each other and the FePt grain size was reduced. For 20 vol. % ZrO₂ doping into TiN, the grain size decreased dramatically from 11. 2 nm to 6. 4 nm, and good perpendicular anisotropy was achieved simultaneously. For the FePt 4nm-SiO₂ 35 vol. % -C 20 vol. % films grown on top of the TiN-ZrO₂ 20 vol. % intermediate layer, well isolated FePt (001) granular films with coercivity higher than 18. 1 kOe and an average size as small as 6. 4 nm were achieved.