文章基本信息

标题：Broadband Antireflection and Light Extraction Enhancement in Fluorescent SiC with Nanodome Structures
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作者：Yiyu Ou ; Xiaolong Zhu ; Valdas Jokubavicius 等
期刊名称：Scientific Reports
电子版ISSN：2045-2322
出版年度：2014
卷号：4
DOI：10.1038/srep04662
出版社：Springer Nature
摘要：We demonstrate a time-efficient and low-cost approach to fabricate Si₃N₄ coated nanodome structures in fluorescent SiC. Nanosphere lithography is used as the nanopatterning method and SiC nanodome structures with Si₃N₄ coating are formed via dry etching and thin film deposition process. By using this method, a significant broadband surface antireflection and a considerable omnidirectional luminescence enhancement are obtained. The experimental observations are then supported by numerical simulations. It is believed that our fabrication method will be well suitable for large-scale production in the future.